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An electron beam, when incident on a solid sample, gets absorbed in the sample in a 'tear
drop' shape. The lateral spread and the depth of this absorption region
depend upon the energy of the incident electron beam. Thus absorbed energy
shows off in various ways, such as, Auger emission, Secondary electron
emission, Back scattered electron emission, Characteristics X-rays and
the continuum X-rays. Generally, the Secondary electron detector forms
the basic image recording system. At C-MET, Pune, the SEM (Phillips, X-30)
has a Back scattered electron detector and an energy dispersive X-ray detector
(EDX), apart from the Secondary electron detector. The XL 30 is a versatile scanning electron microscope with optimum performance for both imaging and analysis. This makes the system ideal for dedicated research as well as for routine-operation such as control monitoring of a manufacturing process. Operating under full software control, the instrument is an excellent tool for the analysis. The fixed final lens aperture column design and the computer controlled alignment guarantee rapid selection of kV and spot size for the full range of kV and spot size, no realignment by the user is necessary, even up to high beam currents. In addition, an embedded EDX system can offer the user a total analytical capability with one single instrument. The following are important details of the microscope: |
| Details of the microscope: |
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