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| Principle of operation |
| Principle: | Glow discharge, well known as an extremely stable excitation source, creates a very uniform sputter spot on the analysed sample. This unique characteristic makes glow discharge an ideal source for quantitative depth profile analyses as well as highly accurate bulk content analysis. The narrow emission lines created by glow discharge reduce line interference and result in simple linear calibrations. This ensures high precision and fewer calibration standards. When the excited atoms produced in the glow discharge return to ground state, they emit light. Each light wavelength emitted is characteristic of the atom from which it came. The light is focused onto the entrance slit of the spectrometer and separated by the concave holographic grating according to wavelength.
| Capability |